Chemistry of Atomic Layer Deposition (de Gruyter Textbook) (Paperback)

Chemistry of Atomic Layer Deposition (de Gruyter Textbook) By Seán Thomas Barry Cover Image

Chemistry of Atomic Layer Deposition (de Gruyter Textbook) (Paperback)

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This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

Product Details ISBN: 9783110712513
ISBN-10: 3110712512
Publisher: de Gruyter
Publication Date: November 22nd, 2021
Pages: 113
Language: English
Series: de Gruyter Textbook