MEMS Materials and Processes Handbook (Mems Reference Shelf #1) (Hardcover)

MEMS Materials and Processes Handbook (Mems Reference Shelf #1) By Reza Ghodssi (Editor), Pinyen Lin (Editor) Cover Image

MEMS Materials and Processes Handbook (Mems Reference Shelf #1) (Hardcover)

By Reza Ghodssi (Editor), Pinyen Lin (Editor)

$319.00


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MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Product Details ISBN: 9780387473161
ISBN-10: 0387473165
Publisher: Springer
Publication Date: April 6th, 2011
Pages: 1188
Language: English
Series: Mems Reference Shelf